Metrology
Manufacturing of nano-microscopic materials, parts and particles of today require an entirely new inspection system capable of perceiving detailed features in nano scale and groundtruth shape. In response to high demand for technological advancement in the production of semiconductors, next generation OLED/QD-OLED displays, microelectronic and metallic parts, films and optical components, we research and develop proprietary technologies and solutions for a digital 3D microscope.
Our technology employs an unprecedented concept in the field of industrial inspection, enabling manufacturers to instantly and accurately measure targets, and find defects in a wide field of view with high lateral resolution. Our 3D microscope is extremely compact and light weight because it is made using just a few significant parts. This miniaturization allows the 3D microscope to be installed inside a narrow or restricted space of the in-line inspection machines. With our solution, manufacturers will have the benefit of discovering the cause of defects, developing a superior manufacturing process, increasing yields, and reducing costs – enabling them to be the first-to-market with premium products at premium prices.
Our 3D microscope solution can measure the thickness/depth/width/shape of materials that have optically rough surfaces, specular surfaces (i.e. mirrors, polished metals and chrome), transparent, and translucent films with particles located in the film layers.
We design and build a custom 3D microscope according to the customer’s requests in the following range, but not limited to:
Microscope type: reflection or transmission
Number of laser source: single to multiple
Height measurement range: up to 25 mm
Height/vertical accuracy: down to 0.15 nm
Vertical resolution: down to 30 nm
Vertical repeatability: down to 0.01 nm
Field of view: from a few hundred um to 150 mm in X and Y-axes - dependent on the lens and camera used
Lateral resolution: down to diffraction limit; relies on the wavelength, lens and camera used
Type of lens used: Micro-objectives or Telecentric lenses
Camera: 1MP to 155 MP, but not limited
Measurement time for a single FOV: 50 ms to 500 ms
Size of microscope head: ~35 x 35 x 100 mm when an objective lens and camera are used; 120 x 120 x 600 mm when e.g. a 7x telecentric lens and 155 MP camera are used; The height of microscope head varies in accordance with the length of the lens used.
The features and physical properties of materials surface, multi-featured parts surface in a single FOV and absorption ratio of beam into various films are unpredictable in real life. We will discuss your specification and requirements in detail to ensure our 3D microscope works for you.